Device for Ultra-pure Water eFLOW serise

Patent Pending

The eFLOW Series controls the specific resistance value of ultra-pure water by supplying carbon dioxide through a hollow fiber gas permeable membrane uniquely developed by DIC. This makes it possible to avoid dust re-adhering, and to prevent static electricity damage to the substrate pattern.

About Antistatic Device for Ultra-pure Water

• The simple structure results in few breakdowns.
• With the unique pipe distribution system, the specific resistance value is easily controlled and has excellent stability.
• Long lifespan of the carbon dioxide gas injection module. (5 year warranty, manufactured by DIC)

Major Applications

• Scrubber cleaning
• High-pressure jet cleaning
• Cleaning in the dicing stage
• Cell cleaning

Panel Mount Type (P series)

The P Series is rack mountable in EIA (Electronic Industries Alliance) standard-compliant rack. For 1AP type, the standard device has a fully cleanable specification for the joints. For the 2AP type, fully cleanable support is available as an option.

Product Name	Treatment Flow Rate(L/min)	Module
eFLOW 1AP-B02	1-16	PF-001L-NA 1ea Module
eFLOW 2AP-B01	5-30	PF-001L-ND2 2ea Module
eFLOW 3AP-B01	10-50	PF-001L-ND3 2ea Module

Cabinet Mount Type (C series)

The C Series includes a cabinet where two CO2 canisters can be installed. The specific resistance sensor is contained in the cabinet and the water pipe can be directly connected to the usage point from eFLOW.

Product Name	Treatment Flow Rate(L/min)	Module
eFLOW 1AC-P201	1-16	PF-001L-NA 1ea Module
eFLOW 2AC-P201	5-30	PF-001L-ND2 2ea Module
eFLOW 3AC-P201	10-50	PF-001L-ND3 2ea Module