ILLUMINATOR SYSTEM
UPLUS ENGINEERINGILLUMINATOR SYSTEM
AW1040 Series
Large illumination area for multi sites testing
AW1040 is an illuminator which is based on ATS1000 and consciously developed for multi sites testing.
It has lager illumination area and higher uniformity.
Illumination area is Φ110mm.
AW1050 Series
Large illumination area for multi sites testing
AW1040 is an illuminator which is based on ATS1000 and consciously developed for multi sites testing.
It has lager illumination area and higher uniformity.
Illumination area is 90x104mm.
AW2170 Series
This series is capable of providing a wide illumination area for 300mm wafer.
AW2170 seriesis capable of providing a wide illumination area foe 300mm wafer.
These illuminators have a same performance of Uniformity, Accuracy and Max illuminace as AW1040 series.
Illumination area is 154x154mm.
