TAKANO_WM-10

UPLUS ENGINEERING

Semicon Wafer Surface Inspection system WM-10

More sensitivity and Eco-friendly Ever seen under 90nm process node

WM-10 is high-end surface inspection system of our WM Series. This product can detect any type of micro defects on non-patterned wafer of semiconductor device and avilable for wide-range wafer size from 6-inch to 8-inch or from 8-inch to 12-inch. And this product is equipped with bule-violet semiconductor laser which is the world's first wafer surface analyzer in this field. This laser makes a contribution to reduce the running cost. This prduct is eco-friendly, as well as being of high quality high speed measuring and low-priced.

Features

  • Provied the best solution for 65-90nm process node
  • World's first wafer surface analyzer using the violet-LD
  • Drastic reduction of the running cost by using the violet-LD
  • Low price / High performance / Small foot print / Easy operation
  • Separability of COP's and real dusts by using original optical system

Specification

Light Source Violet LD(blue-violet semiconductor)
Scan system Helical Scan
Sensitivity 48nm *Bare Wafer
Repeatability o/X ≤ 1% *99% or more
Supported Wafer Bare Wafer / Coated Wafer
Wafer Size 12/8 inch or 8/6 inch
Dimension Size WXDXH 1.482 X 1,173 X 1,950mm
Weight 900kg

Option

  • Automatic sensitivity adjustment function Haze function
  • Double wafer port
  • Map overlapping function
  • X-Y coordinate output (Communication software)
  • Host communication software